Studies of Cosputtered NdFeB Thin Films (<Special issue>Magnetic Thin Film)
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概要
- 論文の詳細を見る
A detailed study on the effect of composition and other process parameters on the magnetic properties of NdFeB thin films is presented. It was found that a neodymium concentration of 13-16 at% and a substrate temperature of 560℃ were suitable for forming the Nd_2Fe_<14>B phase. An investigation into the effect of the substrate revealed that substrates that have oxygen content may not be suitable for preparing these thin films. The coercive force of these films was also found to depend on the thickness.
- 社団法人日本磁気学会の論文
- 1997-04-15
著者
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MATSUMOTO M.
Department of Information Engineering, Shinshu University
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Morisako Akimitsu
Department Of Information Engineering Faculty Of Engineering Shinshu University
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Morisako A.
Dept. Of Information Engineering Shinshu University
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Morisako A.
Department Of Information Engineering Shinshu University
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Takei S.
Department Of Information Engineering Shinshu University
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Matsumoto Mitsunori
Department Of Information Engineering Shinshu University
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PIRAMANAYAGAM S.
Shinshu University
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Piramanayagam S.
Department of Information Engineering, Shinshu University
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Piramanayagam S.n.
Department Of Infomation Engineering Shinshu University
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