Effect of Al-addition on C-axis Orientation of Ba-ferrite Film Deposited on Amorphous Aluminum Oxide (a-AlO) Layer
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概要
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In this study amorphous aluminum oxide (a-AlO) was used as an underlayer to crystallize c-axis oriented Ba-ferrite (BaM) film. But coercivity of these films was going to decrease sharply below 20 nm. A small amount of Al is added with BaM film with a-AlO underlayer. The substrate temperature (T_s) was kept at 550℃. Al content was varied from 0-4.5 atomic percent. Perfect c-axis orientation of BaM thin film is possible with a small addition of Al, even for the film of 10 nm with a Δθ_<50> of 2.5°-2.8°. On the other hand, it was difficult to crystallize BaM/a-AlO film thinner than 25 nm. Coercivity of Al-BaM/a-AlO films in perpendicular direction was higher than that of BaM/a-AlO films, even for the thickness below 20 nm.
- 社団法人日本磁気学会の論文
- 2004-05-01
著者
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Shams N.
Dept. Of Information Engineering Shinshu University
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Morisako A.
Dept. Of Information Engineering Shinshu University
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Matsumoto M.
Dept. of Information Engineering, Shinshu University
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