3519 2 次元角度格子製作システムの開発(第 2 報) : 2 次元角度格子創成の高精度化

概要

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This paper presents a machining system for generating two-dimensional angular grids, which are used in a newly developed multi-degree-of-freedom position detection method. This position detection method basically consists of a two-dimensional angle sensor and an angular grid, on which two-dimensional sinusoidal micro-patterns are generated. The wavelength and amplitude of the sinusoidal micro-pattern are typically 300μm and 200nm, respectively, A fast-tool-servo (FTS) based precision diamond turning system was constructed to generate the angular grid. Since the accuracy of position detection is greatly affected by that of the profile error of the angular grid, the angular grid needs to be generated accurately. In this paper, techniques of improving the accuracy of generating the angular grid are described.
一般社団法人日本機械学会の論文
2000-07-31