328 微小ポリシリコン構造体の強度特性評価

概要

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A micro polycrystalline silicon cantilever is employed widely as a common structural member for microelectromechanical systems (MEMS). It is necessary to build up the reliability design criterion of the micro polycrystalline silicon explaining the strength of cantilever root area that is regarded as a fracture origin due to stress concentration in general. In this study, the bending tests using the micro scale cantilever beams of polycrystalline silicon with notch of several sizes are carried out in order to obtain the strength database of a micro polycrystalline silicon structures. The bending test results are analyzed by means of maximum peak stress smax at the notch root calculated by FEM models, and it is found that this approach does not describe the data. Therefore, a reforming approach are taken into account by use of the two parameters that are the peak stress smax and an area of 0.5 smax, S which indicates the stress extension around the position of peak stress representatively. By this two parameters approach, the test results are explained quantitatively and the limit state describing the fracture of micro cantilever is obtained as σ_<max>=3.88S^<-0.190>
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