(Co-Fe)-Al-O薄膜の化学状態と磁気特性

概要

論文の詳細を見る
The chemical states of (Co-Fe) -Al-O magnetic thin films with various compositional ratios were investigated by X-ray photoelectron spectroscopy (XPS). Samples were prepared by using inductively coupled RF sputtering. A non-reactive Ar atmosphere for both a Co-Fe alloy target and an Al_2O_3 ceramic target was used. Compositions of samples were varied to control the cathode power of the Co-Fe alloy target. Those with high (Co-Fe) / (Al-O) volume ratios exhibited excellent saturation magnetization (M_s) arising from the ideal chemical state of the non-oxidised Co-Fe alloy. Samples with low (Co-Fe) / (Al-O) volume ratios highlighted a problem that the increase in volume of the Al-O layer could cause some degree of Fe oxidation in the Co-Fe alloy, which would lead to a decrease of M_s.
社団法人日本セラミックス協会の論文
2002-07-01