イットリア超微粒子の作製とその添加による窒化アルミニウムの低温焼結

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Ultrafine Y_2O_3 powder was produced from metallic yttrium powder by a radio frequency (RF) plasma method, and used as an additive to aluminum nitride in normal sintering. The average particle size (Microtrack method) , shape (TEM) , specific surface area (BET method) and crystalline structure (X-ray diffraction) of the ultrafine Y_2O_3 powder were evaluated. Density and thermal conductivity were measured for the sintered aluminum nitride containing the ultrafine or commercial Y_2O_3 powders as additive. Grain boundaries of the sintered aluminum nitride were also examined by X-ray diffraction and SEM. Yttrium distribution in the sintered aluminum nitride was analyzed by EPMA. The results are summarized as follows : (1) The ultrafine Y_2O_3 powder contained two allotropic forms. The average particle size and specific surface area of the ultrafine Y_2O_3 powder were 1.63 /Im and 14.2 m^2/g respectively. Particles were spherical. One of the commercial powders tended to form agglomerates, and had a higher specific surface area with bigger effective particle size. (2) The aluminum nitride powder was densified with the ultrafine Y_2O_3 powder more extensively than the one of the commercial Y_2O_3 powders at 1700℃. (3) Thermal conductivity of the sintered aluminum nitride with the ultrafine Y_2O_3 powder was higher (120 W/(・K m)) than that with the commercial Y_2O_3 powders (about 50 W/(・K m) ) . Both of them were sintered at 1700℃. (4) Yttrium ions of the sintered aluminum nitride with the ultrafine Y_2O_3 powder were distributed throughout the sintered bodies compared with the one with the commercial Y_2O_3 powders. (5) The sintered aluminum nitride with the ultrafine Y_2O_3 powder shows a lower oxygen content than the one with the commercial ones.
社団法人日本セラミックス協会の論文
1988-11-01

イットリア超微粒子の作製とその添加による窒化アルミニウムの低温焼結

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