Al_2O_3-TiC複合材切断のための高能率薄刃砥石の作製

概要

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Highly efficient dicing blades with 28 vol% porosity were fabricated by using a doctor blade casting method and pulsed electric current sintering (PECS). WC and W_2C were formed between diamond grains and tungsten matrix materials during a sintering and enhanced the bonding strength between diamond grains and the matrix materials. Fabricated dicing blades and commercial dicing blades which were 0.09 mm in thickness, were evaluated by a constant feeding force dicing machine under 3.0 N constant feeding force. Al_2O_3-TiC composites which had 1.2 mm in thickness were used as a cutting sample. Speeds of fabricated dicing blade and commercial dicing blade were 6.2 mm/s and 2.9 mm/s at 750 mm of cutting length, respectively. Number of diamonds on surfaces of the fabricated dicing blades was kept constant before and after dicing tests, however, that on the commercial dicing blades decreased to half. Specific grinding energy for the fabricated dicing blades and the commercial ones were 133 GJ/m^3 and 213 GJ/m^3, respectively. Therefore, efficient dicing blade was produced by introducing pores and increasing bonding strength between diamond grains and matrix.
社団法人日本セラミックス協会の論文
2006-04-01