製造方法の異なる窒化アルミニウム粉末表面の昇温脱離法による特性評価

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Aluminum nitride (AlN) ceramics are commonly used as high thermal conductive ceramics. Their thermal conductivity is strongly dependent on the chemical state of the starting powder surfaces. Control of the powder surfaces is important. For this purpose, the powder surface characteristics must be studied. Con ventional chemical analylical methods do not provide enough information on the surface characteristics which may influence the sinterability and thermal con ductivity of the products. In this work, temperature programed desorption (TPD) analysis was used to in vestigate the difference of the surface characteristics of powders produced by nitridation of aluminum (powder A), CVD (powder B) and carbothermal reduction (powder C). Powder surfaces of α-Al_2O_3, γ-Al_2O_3 and O Al_2O_3 were also investigated to evaluate the desorption mechanism of H_2O molecules on the AIN powder sur faces. The following conclusions are obtained. First of all, desorptions of H_2. NH_3, H_2O and mass 28 molecules are observed from the AlN powder surfaces. An interes ting conclusion which explains the difference between the most popular commercial AIN powder used to ob tain the high thermal conductivity and the other com mercial powders, is obtained by the TPD spectra. Desorption of NH_3 molecules is observed only for pow der A and powder B. Tendency of H_2O desorption for powder C is similar to that of θ-Al_2O_3. This implies that powder C has a similar surface as θ-Al_2O_3
社団法人日本セラミックス協会の論文
1994-03-01

製造方法の異なる窒化アルミニウム粉末表面の昇温脱離法による特性評価

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