市販窒化ケイ素のNH_x/OH表面グループの拡散反射フーリエ変換赤外線分光による解析

概要

論文の詳細を見る
NH_x/OH surface groups of four different commercial silicon nitride powders produced by two different methods: diimide precipitation and carbothermal reduction with different nitriding media were determined by diffuse reflectance infrared Fourier transform (DRIFT) spectroscopy. The results show that for both methods the nitriding media has a profound effect on the powders surface composition. In silicon nitridepowders produced using NH_3 as nitriding media in both methods, surface hydrogen content in the form of NH_x/OH groups is larger than for a powder using N_2 in the carbothermal reduction process. The intensity of NH and NH_2 groups identified and quantified by DRIFT (this work) correlate with the amounts of N_2 desorbed molecules above 1300℃ and NH_3 desorbed molecules below 1300℃, measured by temperature programmed desorption mass spectroscopy (TPDMS) for the same powders, respectively. It is concluded that the NH structures form part of the surface layer.
2003-01-01