多層薄膜構造のレーザ加工特性

概要

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Laser machining of multi-layer thin film is promissing to become an important processing in fabrications of electronic circuits. The various factors having influence on the characteristics of multi-layer thin film machining with a laser are evaluated theoretically and experimentally. The three dimensional heat diffusion equations including laser light absorption in multi-layer thin film structure are solved numerically to give the time evolution of temperature. Experiments were performed on amorphous Si (a-Si) multi-layer thin film structure of various thickness on transparent conductive oxide(TCO)/glass substrate to verify numerical results. The samples were irradiated with a Q-switched Nd : YAG laser at λ=1.06μm and at λ=0.53μm. The experimental results on the dependence of laser wavelength, laser pulse duration and laser irradiated energy on machining characteristics are in good agreement with the calculated results.
公益社団法人精密工学会の論文
1991-01-05