自己組織化ポリマーマスクにより作製したCo-Ptドットのサイズばらつきと磁気特性

概要

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Co-Pt dot arrays were prepared by ion milling etching using a self-assembled diblock copolymer mask. Two samples with different diameter of 24 nm and 38 nm, and similar size dispersion of 13-14 % were fabricated. The Co-Pt dots were indicated to have damaged portion, which has reversible magnetic propertiy, from the difference between the dc-demagnetization (DCD) curve and the hysteresis curve. It is estimated that the depth of the damaged portion is about 3 nm from the sidewall surface of the dot. The Switching Field Distribution (SFD) was roughly estimated by fitting the DCD curve. The DCD curve was successfully fitted by two SFD curves with high and low Hcs. The SFD curves at high-Hc are supposed to reflect the intrinsic SFD of the dots, and they show similar SFD of 12-15 % in spite of difference in the dot size.
2010-07-01