Excimer Laser Annealing of Hydrogen Modulation Doped a-Si Film

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2007-05-01

著者

• Heya Akira

  Department Of Materials Science & Chemistry University Of Hyogo

• Kawamoto N

  Department Of Electrical And Electronic Engineering Yamaguchi University

• HEYA Akira

  University of Hyogo

• MATSUO Naoto

  University of Hyogo

• KAWAMOTO Naoya

  Yamaguchi University

• Matsuo N

  Department Of Materials Science & Chemistry University Of Hyogo

• Matsuo Naoto

  Univ. Hyogo Hyogo

• SERIKAWA Tadashi

  Osaka University

関連論文

• Influence of Laser Plasma Soft X-Ray Irradiation on Crystallization of a-Si Film by Infrared Furnace Annealing
• Enhancement of secondary grain growth of low-temperature polycrystalline silicon by visible laser irradiation: visible-laser-induced lateral crystallization (Special issue: Active-matrix flatpanel displays and devices: TFT technologies and related materia
• Influence of Post Excimer Laser Annealing on Crystallinity of Precursor Polycrystalline Si Film Formed by Solid Phase Crystallization
• Role of Hydrogen in Polycrystalline Si by Excimer Laser Annealing
• Crystal Growth of Low-Temperature Processed Poly-Si by Excimer Laser Annealing - Dependences of Poly-Si Grain on Energy Density and Shot Number -
• Influence of Hydrogen in a-Si on Recrystallization of Low-Temperature Processed Poly-Si Film by Excimer Laser Annealing
• Extension of Physical Limit of Conventional Metal-Oxide-Semiconductor Transistor by Double Barriers Formed at the Channel Edges
• Study of Crystal Growth Mechanism for Poly-Si Film Prepared by Excimer Laser Annealing
• Analysis of Direct Tunneling for Thin SiO_2 Film
• Analysis of Direct Tunneling for Thin SiO_2 Film
• Influence of Microroughness of Si and Native Oxide on Adsorption of Organic Carbon in Water
• Thermoluminescence of light and X-ray irradiated semiconductor-doped glasses
• Thermoluminescence of Photodarkened CdS-Doped Glasses
• Effects of glass composition on photodarkening in CdS-doped glasses
• Influence of microcrystallite size on photodarkening effects in CdS-doped glasses
• Dependence of photodarkening on alloy composition of CdSxSe_＜1-x＞ nanocrystals in glasses
• Laser-induced reversion of photodarkening in CdS-doped glass
• Internal Stress in Polycrystalline Si Film Recrystallized by Excimer Laser Annealing
• Effect of Hydrogen and Thermal Conductivity on Nucleation of Polycrystalline Si by Excimer Laser Annealing
• Grain Morphology of Recrystallized Polycrystalline-Si Film by Excimer Laser Annealing
• Characteristics of Recrystallized poly-Si Film Prepared by ELA of a-Si Deposited on SiO2 / SiN / Glass Using PE-CVD Method
• Characterization of Poly-Silicon Film Prepared by Excimer Laser Annealing
• Effect of Hydrogen on Secondary Grain Growth of Polycrystalline Silicon Films by Excimer Laser Annealing in Low-Temperature Process
• Effects of High Nitrogen Pressure and Thermal Treatment on Adhesion to Amorphous Silicon/Silicon Nitride/Polyethersulfone Substrate during Excimer Laser Annealing
• Influence of laser plasma soft X-ray irradiation on crystallization of a-Si film by infrared furnace annealing
• Silicon Resonant Tunneling Metal-Oxide-Semiconductor Transistor for Sub-0.1μm Era(Special Issue on Advanced Sub-0.1μm CMOS Devices)
• Excimer Laser Annealing of Hydrogen Modulation Doped a-Si Film
• Grain Enlargement of Polycrystalline Silicon by Multipulse Excimer Laser Annealing: Role of Hydrogen
• Effects of High Nitrogen Pressure and Thermal Treatment on Adhesion to Amorphous Silicon/Silicon Nitride/Polyethersulfone Substrate during Excimer Laser Annealing
• Behavior of Hydrogen in Excimer Laser Annealing of Hydrogen-Modulation-Doped Amorphous Silicon Layer
• Properties of Surface-Modification Layer Generated by Atomic Hydrogen Annealing on Poly(ethylene naphthalate) Substrate
• Hydrogen Modulation-Doped Structures to Improve Crystalline Fraction of Polycrystalline Silicon Films Prepared by Excimer Laser Annealing at Low Energy Densities
• Surface Modification of Poly(ethylene naphthalate) Substrate and Its Effect on SiNx Film Deposition by Atomic Hydrogen Annealing
• Surface Treatment of Plastic Substrates using Atomic Hydrogen Generated on Heated Tungsten Wire at Low Temperatures
• Reliability of Low Temperature Polycrystalline Silicon Thin-Film Transistors with Ultrathin Gate Oxide

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