Impact of Long-Period Line-Edge Roughness (LER) on Accuracy in Critical Dimension (CD) Measurement and New Guideline for CD Metrology
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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YAMAGUCHI Atsuko
Central Research Laboratory, Hitachi, Ltd.
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Yamaguchi Atsuko
Central Research Laboratory Hitachi Ltd.
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Yamaguchi Atsuko
Association Of Super-advanced Electronics Technologies:(present Address)hitachi Central Laboratory
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Fukuda Hiroshi
Central Research Laboratory Hitachi Ltd.
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Akira Yamaguchi
Department Of Chemistry Graduate School Of Science Tohoku University
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Kawada Hiroki
Hitachi High-technologies Corp.
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IIZUMI Takashi
Hitachi High-Technologies Corporation
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