A Detection Method for a T-Topped Profile in Resist Patterns by Top-Down-View Critical Dimension Scanning Electron Microscope

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-06-30

著者

• YAMAGUCHI Atsuko

  Central Research Laboratory, Hitachi, Ltd.

• Fukuda Hiroshi

  Central Research Laboratory Hitachi Ltd.

• Akira Yamaguchi

  Department Of Chemistry Graduate School Of Science Tohoku University

• IIZUMI Takashi

  Hitachi High-Technologies Corporation

• KOMURO Osamu

  Hitachi High-Technologies Corporation

• YONEDA Shozo

  Hitachi High-Technologies Corporation

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• A Detection Method for a T-Topped Profile in Resist Patterns by Top-Down-View Critical Dimension Scanning Electron Microscope
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