高出力静電リニアモータを用いた高精度位置決め制御

概要

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Positioning control with a resolution of nm order is performed using high-power electrostatic linear drive. The authors have developed high-power electrostatic drive called DEMED (Dual Excitation Multiphase Electrostatic Drive) . DEMED, especially its linear type, has performed superior dynamic performaces such as a power per weight ratio of 230W/kg and a maximum acceleration of over 100G. In this paper, the first trial of servo control of linear-type DEMED is described. Firstly, the thrust force of DEMED is simply modelled for designing controller and one method of feedback control for single frequency driving method is proposed. Secondly, an electrode position sensor, which is necessary for feedback control, is proposed and fabricated. Finally, high precision positioning control is performed. For the experiments, a linear table which equips an optical linear encoder with a resolution of 6.25nm is fabricated. A linear and stacked type of DEMED is mounted on the linear table. By feeding two different feedback gains depending on the positioning error, positioning control within ±1 pulse (=6.25nm) is achieved.
公益社団法人精密工学会の論文
1998-09-05