スムーズインパクト駆動機構(SIDM)の開発 : 駆動機構の提案と基本特性

概要

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The piezoelectric element has high positioning resolution although it suffers from the problem of a rather small displacement range. The proposed actuator can achieve both a high positioning resolution and a long stroke. This mechanism is modified the construction of Impact Drive Mechanism (IDM), and is named Smooth Impact Drive Mechanism (SIDM) because of the smooth movement. SIDM is composed of 3 parts, which are moving body placed on the base with little friction, piezoelectric element and friction part placed on the base with a certain friction. SIDM has coarse and precise driving modes. In coarse driving modes, sawtooth voltage is applied to the piezoelectric element, and the movig body is moved in a long stroke with slip because of the inertia and the friction of the moving body. In precise driving modes, a slowly changed voltage is applied to the piezoelectric element, the main body is moved with the movement of the piezo itself without slip. An experimental translation stage incorporating the SIDM has been built to evaluate the performance of the SIDM.
社団法人精密工学会の論文
1999-01-05