Characterization of Highly Concentrated Bi Donors Wire-\delta-Doped in Si
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概要
- 論文の詳細を見る
We studied the Bi wire-\delta-doping process to achieve a high concentration of Bi donors in Si. Our process has two steps: (i) burial of Bi nanowires in Si by molecular beam epitaxy, and (ii) activation of Bi atoms in the \delta-doped layer by laser annealing. The peak concentration of Bi atoms in the \delta-doped layer is controlled by two parameters: the coverage of surfactant layer, and the growth temperature during the Si cap-layer growth, whose maximum concentration is larger than 10^{20} cm-3. Photoluminescence and electrical carrier transport measurements reveal that dense Bi atoms are activated upon heating the area at close to the melting point of Si. As a result, our doping process results in Bi donors in the wire-\delta-doped layer with concentration of {>}10^{18} cm-3. This will be useful for establishing next-generation, quantum information processing platform.
- 2012-11-25
著者
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Sakamoto Kunihiro
National Institute Of Advanced Industrial Science And Technology (aist)
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Miki Kazushi
National Institute Of Materials Science (nims)
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Koyano Tamotsu
Cryogenics Center Univ. Of Tsukuba
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Fukatsu Susumu
Graduate School Of Arts And Sciences The University Of Tokyo
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NITTOH Koh-ichi
National Institute of Materials Science (NIMS)
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Yasutake Yuhsuke
Graduate School Of Arts And Sciences The University Of Tokyo
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Sakamoto Kunihiro
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Murata Koichi
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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Yasutake Yuhsuke
Graduate School of Arts and Sciences, The University of Tokyo, Meguro, Tokyo 153-8902, Japan
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Neumann Peter
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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Fukatsu Susumu
Graduate School of Arts and Sciences, The University of Tokyo, Meguro, Tokyo 153-8902, Japan
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Neumann Péter
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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Miki Kazushi
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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Nittoh Koh-ichi
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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