A Study of Stacked Buffer Layers for the Epitaxial Growth of Zn0.58Mg0.42O Films on c-Sapphire by Pulsed Laser Deposition
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概要
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We report the growth of hexagonal Zn0.58Mg0.42O thin films on a c-plane sapphire substrate via pulsed laser deposition using Zn0.7Mg0.3O/Zn0.9Mg0.1O/ZnO stacked buffer layers of various thicknesses. The effects of the stacked buffer layer thickness on the structural and optical properties were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), energy dispersive X-ray (EDX), and UV--visible spectroscopy. The XRD results showed that whereas the cubic and hexagonal phases formed without a stacked buffer layer, only the hexagonal Zn0.58Mg0.42O phase grew in the stacked buffer layer configuration. The stacked buffer layer could accommodate structural inconsistencies and prevent phase separation in high-Mg films. As the thickness of each stacked buffer layer decreased, the crystalline quality of the hexagonal Zn0.5Mg0.5O film was enhanced.
- 2012-09-25
著者
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Yun Young
Department Of Earth And Planetary Sciences School Of Science Tokyo Institute Of Technology
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Lee Won
Department Of Agricultural And Biological Engineering University Of Florida
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Kim Hong
Department Of Chemistry Advanced Materials Chemistry Research Center Korea University
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Park Mi
Department Of Biology College Of Science Yonsei University
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Lee Jong
Depart. Of Oncology Yonsei Univ. Wonju College Of Medicine
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Kim Chang
Department Of Biochemistry University Of Oxford
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Jang Nak
Major of Electrical and Electronics, Korea Maritime University, Busan 606-791, Korea
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Pin Min
Department of Materials and Component Engineering, Dong Eui University, Busan 614-714, Korea
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Lee Won
Department of Materials and Component Engineering, Dong Eui University, Busan 614-714, Korea
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Kim Chang
Department of Nano Semiconductor Engineering, Korea Maritime University, Busan 606-791, Korea
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Park Mi
Department of Materials and Component Engineering, Dong Eui University, Busan 614-714, Korea
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Yun Young
Department of Radio Communication Engineering, Korea Maritime University, Busan 606-791, Korea
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Kim Hong
Department of Applied Sciences, Korea Maritime University, Busan 606-791, Korea
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Lee Jong
Department of Nano Semiconductor Engineering, Korea Maritime University, Busan 606-791, Korea
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