Propagation Characteristics of Surface Acoustic Waves in AlN/128° $Y$–$X$ LiNbO3 Structures
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概要
- 論文の詳細を見る
In this study, propagation characteristics of surface acoustic waves in a layered piezoelectric structure (AlN/128° $Y$–$X$ LiNbO3) are investigated. The phase velocity and coupling coefficient of the layered structure with interdigital transducers (IDTs) and/or thin metal films deposited at various interfaces are calculated numerically. The effects of the polarity of 128° $Y$–$X$ LiNbO3 on SAW characteristics are illustrated. The calculated phase velocity and coupling coefficient of SAWs in the IDT/ZnO/128° $Y$–$X$ LiNbO3 structure are also demonstrated for comparison. The simulation results obtained in this study can be applied to the design of SAW devices using AlN/128° $Y$–$X$ LiNbO3 structures.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-04-25
著者
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Wu Sean
Department Of Electrical Engineering National Cheng Kung University
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Lee Maw-shung
Department And Institute Of Electronics Engineering National Kaohsiung University Of Applied Science
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Ro Ruyen
Department Of Electrical Engineering I-shou University
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Wu Sean
Department of Electronics Engineering and Computer Science, Tung-Fang Institute of Technology, 110 Tung-Fung Rd., Hunei Shiang, Kaohsiung County 829, Taiwan, R.O.C.
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Lin Zhi-Xun
Department of Electrical Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan, R.O.C.
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Lin Zhi-Xun
Department of Electronics Engineering, National Kaohsiung University of Applied Science, 415 Chien Kung Rd., Kaohsiung City 807, Taiwan, R.O.C.
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Lee Ruyue
Department of Electrical Engineering, I-Shou University, 1, Section 1, Syuecheng Rd., Dashu Township, Kaohsiung County 840, Taiwan, R.O.C.
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Ro Ruyen
Department of Communication Engineering, I-Shou University, 1, Section 1, Hsueh-Cheng Rd., Ta-Hsu Hsiang, Kaohsiung County 840, Taiwan, R.O.C.
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Ro Ruyen
Department of Electrical Engineering, I-Shou University, 1, Section 1, Syuecheng Rd., Dashu Township, Kaohsiung County 840, Taiwan, R.O.C.
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