Sputtering Highly C-Axis-Oriented AIN Films on Y-128° LiNbO_3

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-06-01

著者

• Sun Wenhong

  Department Of Electrical Engineering University Of South Carolina

• Wu L

  National Cheng Kung Univ. Tainan Twn

• Wu L

  F‐tech Corp. Tainan Twn

• Wu Long

  Department Of Electrical Enggineering National Cheng-kung University

• WU Sean

  Department of Electrical Engineering, National Cheng Kung University

• Wu S

  Tung‐fung Junior Coll. Technol. And Commerce Kaohsiung Twn

• Wu Sean

  Department Of Electrical Engineering National Cheng Kung University

• Wu Long

  Department Of Electrical Engineering National Cheng Kong University

• CHEN Ping-Cheng

  Department of Electrical Engineering, National Cheng Kung University

• SONG Hong-Tie

  Department of Electrical Engineering, National Cheng Kung University

• CHURE Ming-Cherng

  Department of Electrical Engineering, Far East College

• Wu Shuai

  Department Of Electrical Engineering University Of South Carolina

• Song Hong-tie

  Department Of Electrical Engineering National Cheng Kung University University Rd.

• Chen Ping-cheng

  Department Of Electrical Engineering National Cheng Kung University University Rd.

• Chen Ping-cheng

  Department Of Electrical Engineering National Cheng Kumg University I University Rd.

• Chure Ming-cherng

  Department Of Electrical Engineering Far East College Tainan

関連論文

• The Characterization of Surface Acoustic Wave Modes on Rotated Y-Cut Quartz (ST-X Quartz) with Different AIN Film Thickness
• Temperature Compensation With AlN Film on Y-128° LiNbO_3 : Surfaces, Interfaces, and Films
• Crystalline Structure and Surface Morphology of AIN Films Sputtered on Rotated Y-Cut Quartz (ST-Quartz)
• Characteristic of Surface Acoustic Wave Gas Sensor with Resonator Structure (Proceedings of The 5Th East Asian Conference on Chemical Sensors: The 33RD Chemical Sensor Symposium)
• Influence of Manganese on Lanthanum-Doped BaTiO_3
• The Microstructure of ZnO Varistor Doped with Antimony Oxide
• Low Insertion-Loss, and Wideband Dual-Mode Bandpass Filters with Dual Perturbation Elements
• 10Milliwatt Pulse Operation of 265nm AlGaN Light Emitting Diodes
• Effect of Cr_2O_3 Additives on Microstructure and Electrical Properties of Nd-Modified PbTiO_3 Ceramics
• Sputtering Highly C-Axis-Oriented AIN Films on Y-128° LiNbO_3
• Influence of Substrate Temperature to Prepare C-Axis-Oriented AlN Films on Rotated Y-cut Quartz(ST-Quartz)
• Effect of Additions on Conduction Properties of ZnO Varistors
• The Effect of Antimony Oxide on the Electrical Properties and Stability of ZnO Varistors
• The Effects of Valence States of Manganese on Electrical Properties of ZnO Varistors
• Grain Growth and Electrical Properties in ZnO Varistors with Various Valence States of Additions
• A New Selective Area Lateral Epitaxy Approach for Depositing a-Plane GaN over r-Plane Sapphire
• Lateral Current Crowding in Deep UV Light Emitting Diodes over Sapphire Substrates
• 324 nm Light Emitting Diodes With MilliWatt Powers : Semiconductors
• Submilliwatt Operation of AllnGaN Based Multifinger-Design 315 nm Light Emitting Diode (LED) over Sapphire Substrate : Semiconductors
• Matrix Addressable Micro-Pixel 280nm Deep UV Light-Emitting Diodes
• Micro-pixel Design Milliwatt Power 254nm Emission Light Emitting Diodes
• Continuous Wave Milliwatt Power AlGaN Light Emitting Diodes at 280nm
• Pb(Mg_Nb_)O_3 Ceramics Produced by Modified Two-Stage Calcination Process
• Influence of Calcining Temperature on CuO-Modified (Ba_Sr_)(Ti_Zr_)O_3 Ceramics
• The Dielectric and Piezoelectric Properties of 0.125PMN-0.875PZT Ceramics Doped with 4PbO・B_2O_3
• Analysis and Simulation of Stacked-Segment Electromechanical Transducers with Partial Electrical Excitation by PSPICE
• The Equivalent Circuit of an AT-Cut Quartz Resonator and Its Application
• Ba(Ti,Zr)O_3 Ceramics Sintered with Lead Borate Glass
• 4PbO・B_2O_3 : A New Sintering Agent For Pb(Zr,Ti)O_3 Ceramics
• Anisotropy in Piezoelectric Properties of Calcium-Modified Lead Titanate Ceramics
• Lead Borate Glass : A New Sintering Agent for BaTiO_3 Ceramics
• Large Chip High Power Deep Ultraviolet Light-Emitting Diodes
• Computer Simulation of Direct-Current Field Dependence of the Dielectric Constant of Al_2O_3-Doped Barium Stronium Titanate in the Paraelectric State
• Preparation and Microwave Characterization of Ba_xSr_TiO_3 Ceramics
• SAW Sensors of Organophosphorous Compound with No Humidity Interference
• Piezoceramic HF Resonator with Zero Temperature Coefficient
• Effect of Drying Temperature on the Characteristics of the Lead Zirconium Titanate Powders Prepared by Sol-Gel Process
• Evaluation of Low-Temperature Processing of Lead Zirconate Titanate (53/47) Ceramics Derived from 1-Propanol-Based Sol-Gel Stock Solutions
• Characterization of AiN Films on Y-128° LiNbO_3 by Surface Acoustic Wave Measurement
• Multiple Acoustical Matching Layer Design of Ultrasonic Transducer for Medical Application
• Dielectric Properties of Al_2O_3-Doped Barium Strontium Titanate for Application in Phased Array Antennas
• Effect of Electrode Area on Equivalent Circuit of AT-Cut Quartz Resonator
• Crystal Polarity Effects on Magnesium Implantation into GaN Layer
• Effects of Phosphorus Implantation on the Activation of Magnesium Doped in GaN
• A Design Approach of Tonpiltz Transducer(Structure and Mechanical and Thermal Properties of Condensed Matter)
• A New Two-Dimensional Analytical Threshold Voltage Model for Short-Channel Triple-Material Surrounding-Gate Metal-Oxide-Semiconductor Field-Effect Transistors
• 10 Milliwatt Pulse Operation of 265 nm AlGaN Light Emitting Diodes
• Continuous Wave Milliwatt Power AlGaN Light Emitting Diodes at 280 nm
• Crystalline Structure and Surface Morphology of AlN Films Sputtered on Rotated Y-Cut Quartz (ST-Quartz)
• Theoretical Bulk Acoustic Wave Properties of (103) AlN Films
• Propagation Characteristics of Surface Acoustic Waves in AlN/128° $Y$–$X$ LiNbO3 Structures
• Bulk Acoustic Wave Analysis of Crystalline-Plane-Oriented Aluminum Nitride Films
• Evaluation of Low-Temperature Processing of Lead Zirconate Titanate (53/47) Ceramics Derived from 1-Propanol-Based Sol-Gel Stock Solutions
• SAW Sensors of Organophosphorous Compound with No Humidity Interference

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