Influence of Substrate Temperature to Prepare C-Axis-Oriented AlN Films on Rotated Y-cut Quartz(ST-Quartz)

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-02-15

著者

• Sun Wenhong

  Department Of Electrical Engineering University Of South Carolina

• Wu L

  National Cheng Kung Univ. Tainan Twn

• Wu L

  F‐tech Corp. Tainan Twn

• Wu Long

  Department Of Electrical Enggineering National Cheng-kung University

• WU Sean

  Department of Electrical Engineering, National Cheng Kung University

• Wu S

  Tung‐fung Junior Coll. Technol. And Commerce Kaohsiung Twn

• Wu Sean

  Department Of Electrical Engineering National Cheng Kung University

• Wu Long

  Department Of Electrical Engineering National Cheng Kong University

• CHURE Ming-Cherng

  Department of Electrical Engineering, Far East College

• Wu Shuai

  Department Of Electrical Engineering University Of South Carolina

• Chure Ming-cherng

  Department Of Electrical Engineering Far East College Tainan

関連論文

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• 10Milliwatt Pulse Operation of 265nm AlGaN Light Emitting Diodes
• Effect of Cr_2O_3 Additives on Microstructure and Electrical Properties of Nd-Modified PbTiO_3 Ceramics
• Sputtering Highly C-Axis-Oriented AIN Films on Y-128° LiNbO_3
• Influence of Substrate Temperature to Prepare C-Axis-Oriented AlN Films on Rotated Y-cut Quartz(ST-Quartz)
• Effect of Additions on Conduction Properties of ZnO Varistors
• The Effect of Antimony Oxide on the Electrical Properties and Stability of ZnO Varistors
• The Effects of Valence States of Manganese on Electrical Properties of ZnO Varistors
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• Crystalline Structure and Surface Morphology of AlN Films Sputtered on Rotated Y-Cut Quartz (ST-Quartz)
• Theoretical Bulk Acoustic Wave Properties of (103) AlN Films
• Propagation Characteristics of Surface Acoustic Waves in AlN/128° $Y$–$X$ LiNbO3 Structures
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• SAW Sensors of Organophosphorous Compound with No Humidity Interference

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