Characterization of AiN Films on Y-128° LiNbO_3 by Surface Acoustic Wave Measurement
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概要
- 論文の詳細を見る
Y-128° LiNbO_3 is used extensively for the development of surface acoustic wave (SAW) devices. ALN thin films are an attractive material that have some excellent characteristics, such as high surface acoustic wave (SAW) velocity, piezoelectricity, high-temperature stability, and stable chemical properties. In this research, AIN films were sputtered on Y-128° LiNbO_3 to yield a new piezoelectric substrate for SAW devices. The X-ray diffraction (XRD) method and SAW measurement were used to evaluate the material and acoustic properties of this structure. The experimental results exhibited that highly c-axis-oriented AlN films were prepared on Y-128° LiNbO_3. AIN films on Y-128° LiNbO_3 can effectively enhance the SAW velocity and improve the poor temperature stability, but reduce the electromechanical coupling coefficient (k^2) values. As the ratio (film-thickness/acoustic-wavelength) increased, the SAW velocities and the temperature coefficient of frequency (TCF) all increased, but the electromechanical coupling coefficient (k^2) values decreased.
- 社団法人応用物理学会の論文
- 2002-07-15
著者
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WU Sean
Department of Electrical Engineering, National Cheng Kung University
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Wu Sean
Department Of Electrical Engineering National Cheng Kung University
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Wu Sean
Department Of Electronics Engineering Tung-fung Junior College Of Technology And Commerce
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CHEN Yeong-Chin
Department of Electrical Engineering, National Cheng-Kung University
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Chen Yeong-chin
Department Of Electronics Engineering Tung-fung Junior College Of Technology And Commerce
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Chen Yeong-chin
Department Of Electrical Engineering National Cheng-kung University
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CHANG Yee
Department of Material Science Engineering, National Cheng Kung University
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Chang Yee
Department Of Material Science Engineering National Cheng Kung University
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Chen Yeong-Chin
Department of Computer Science and Information Engineering, Asia University, Taichung, Taiwan 413, R.O.C.
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