Bulk Acoustic Wave Analysis of Crystalline-Plane-Oriented Aluminum Nitride Films
スポンサーリンク
概要
- 論文の詳細を見る
Bulk acoustic wave analysis of all crystalline-plane-oriented AlN films were studied in this research. Different crystalline-plane-oriented AlN films will form different vibration modes and acoustic properties. (002)-, (004)-, and (006)-oriented AlN films provided a pure longitudinal mode. (100)-, (110)-, (200)-, (210)-, and (300)-oriented AlN films provided a pure fast shear mode. (101)-, (102)-, (103)-, (112)-, (201)-, (202)-, (104)-, (203)-, (211)-, (114)-, (212)-, (105)-, (204)-, (213)-, (302)-, (205)-, (106)-, and (214)-oriented AlN films provided a quasi-longitudinal mode and a quasi-shear mode. These bulk acoustic wave properties can be used for further device design and application.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-10-15
著者
-
Wu Sean
Department Of Electrical Engineering National Cheng Kung University
-
Lee Maw-shung
Department And Institute Of Electronics Engineering National Kaohsiung University Of Applied Science
-
Wu Sean
Department of Electronics Engineering and Computer Sciences, Tung-Fang Institute of Technology, 110 Tung-Fung Road, Hunei Shiang, Kaohsiung 829, Taiwan, R.O.C.
-
Lin Zhi-Xun
Department of Electrical Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan, R.O.C.
-
Lin Zhi-Xun
Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan, R.O.C.
-
Ro Ruyen
Department of Communication Engineering, I-Shou University, 1, Section 1, Hsueh-Cheng Rd., Ta-Hsu Hsiang, Kaohsiung County 840, Taiwan, R.O.C.
関連論文
- The Characterization of Surface Acoustic Wave Modes on Rotated Y-Cut Quartz (ST-X Quartz) with Different AIN Film Thickness
- Temperature Compensation With AlN Film on Y-128° LiNbO_3 : Surfaces, Interfaces, and Films
- Low Insertion-Loss, and Wideband Dual-Mode Bandpass Filters with Dual Perturbation Elements
- 10Milliwatt Pulse Operation of 265nm AlGaN Light Emitting Diodes
- Sputtering Highly C-Axis-Oriented AIN Films on Y-128° LiNbO_3
- Influence of Substrate Temperature to Prepare C-Axis-Oriented AlN Films on Rotated Y-cut Quartz(ST-Quartz)
- A New Selective Area Lateral Epitaxy Approach for Depositing a-Plane GaN over r-Plane Sapphire
- Lateral Current Crowding in Deep UV Light Emitting Diodes over Sapphire Substrates
- 324 nm Light Emitting Diodes With MilliWatt Powers : Semiconductors
- Submilliwatt Operation of AllnGaN Based Multifinger-Design 315 nm Light Emitting Diode (LED) over Sapphire Substrate : Semiconductors
- Matrix Addressable Micro-Pixel 280nm Deep UV Light-Emitting Diodes
- Micro-pixel Design Milliwatt Power 254nm Emission Light Emitting Diodes
- Pyroelectric Properties of Sol-Gel Derived(Pb, Ca)TiO_3 Thin Film Detectors
- Characterization of Calcium-Modified Lead Titanate Thin Films Derived from a Diol-Based Sol-Gel Process
- Pyroelectric Properties of La-modified Lead Titanate Thin Film Detectors
- Properties of LiTaO_3 Thin Films Derived by a Diol-Based Sol-Gel Process
- Microstructure and Absorption Property of Silver-Black Coatings
- The Properties of Lead Titanate Thin Films Derived from a Diol-Based Sol-Gel Process
- Characterization of AiN Films on Y-128° LiNbO_3 by Surface Acoustic Wave Measurement
- Multiple Acoustical Matching Layer Design of Ultrasonic Transducer for Medical Application
- Crystal Polarity Effects on Magnesium Implantation into GaN Layer
- Effects of Phosphorus Implantation on the Activation of Magnesium Doped in GaN
- A Design Approach of Tonpiltz Transducer(Structure and Mechanical and Thermal Properties of Condensed Matter)
- Scattering Characteristics of Layered Chiral Media for Normally Incident Transverse Waves
- Elastic Wave Propagation Characteristics at Chiral Interfaces
- Forward and Inverse Solutions for the Scattering of Longitudinal Waves
- Response of Longitudinal Waves Normally Impinging upon Layered Chiral Media
- A New Two-Dimensional Analytical Threshold Voltage Model for Short-Channel Triple-Material Surrounding-Gate Metal-Oxide-Semiconductor Field-Effect Transistors
- Crystalline Structure and Surface Morphology of AlN Films Sputtered on Rotated Y-Cut Quartz (ST-Quartz)
- Theoretical Bulk Acoustic Wave Properties of (103) AlN Films
- Propagation Characteristics of Surface Acoustic Waves in AlN/128° $Y$–$X$ LiNbO3 Structures
- Frequency Responses of Surface-Acoustic-Wave Filters with Two-Track Slanted Finger Interdigital Transducers
- Design of Two-Track Surface Acoustic Wave Filters with Width-Controlled Reflectors
- Bulk Acoustic Wave Analysis of Crystalline-Plane-Oriented Aluminum Nitride Films
- Pyroelectric Properties of Sol–Gel Derived (Pb,Ca)TiO3 Thin Film Detectors
- Parametric Study of Reflection Characteristics at Ahiral-Chiral Interfaces