Pyroelectric Properties of Sol–Gel Derived (Pb,Ca)TiO3 Thin Film Detectors

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概要

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• Calcium-modified lead titanate (PCT) thin film pyroelectric infrared (IR) detectors were fabricated on Pt(111)/SiO2/Si(100) substrates using a diol-based sol–gel process. The randomly oriented PCT thin film, which has not undergone the poling treatment, exhibits a relatively small dielectric constant and a large pyroelectric coefficient. The pyroelectric properties of PCT thin film point detectors with various Ca contents on modulation frequency are measured and compared. The optimized composition of PCT thin film IR detectors was found to be the PCT(25), which exhibits a large voltage responsivity of 4533 (V/W) at 20 Hz and a specific detectivity ($D^{*}$) of $6.45\times10^{7}$ cmHz1/2/W at 100 Hz. The results show that Pb1-xCaxTiO3 thin film with $x = 0.25$ [PCT(25)] was most suitable for application to the pyroelectric thin film IR detector.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 2000-07-15

著者

• Chen Ying-chung

  Department Of Electrical Engineering National Sun Yat-sen University

• Lee Maw-shung

  Department And Institute Of Electronics Engineering National Kaohsiung University Of Applied Science

• CHENG Chein-Chuan

  Department of Electronic Engineering, Sze Hai Institute of Technology and Commerce

• Kao Ming-cheng

  Department Of Electrical Engineering National Sun Yat-sen University

• Wang Chih-ming

  Department Of Electrical Engineering Cheng-shiu Institute Of Technology

• Huang Yao-Te

  Department of Electrical Engineering, National Sun Yat-Sen University

• Kao Ming-Cheng

  Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.

• Lee Maw-Shung

  Department of Electronic Engineering, National Kaohsiung Institute of Technology, Kaohsiung, Taiwan, R.O.C.

• Huang Yao-Te

  Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.

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