Electrical and Optical Characteristics of Bi4Ti3O12 Thin Film on Indium–Tin-Oxide/Glass

概要

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Thin films of bismuth titanate are deposited on indium–tin-oxide (ITO)/glass substrates by RF magnetron sputtering for 60 min at room temperature using a $\text{Bi$_{4}$Ti$_{3}$O$_{12}$}+\text{4\,wt\,\% Bi$_{2}$O$_{3}$}$ ceramic target, and they are annealed at various temperatures ranging from 600 to 725 °C by a rapid thermal processing for 10 min. The experimental results indicate that the Bi4Ti3O12 films annealed at 675–700 °C exhibit superior electrical characteristics compared to those of other ferroelectric materials such as BaTiO3, PbTiO3, and SrTiO3 films, including a higher dielectric constant, a higher polarization charge density, and a more stable leakage current density. In addition, a high optical transmittance of the film was obtained at an annealing temperature of 650 °C. The results suggest that Bi4Ti3O12 thin film is a candidate worthy of consideration as the insulating layer material of AC thin film electroluminescence devices.
2006-06-15