Theoretical Bulk Acoustic Wave Properties of (103) AlN Films
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概要
- 論文の詳細を見る
The theoretical bulk acoustic wave properties of (103)-oriented AlN films were studied in this research. The (103)-oriented AlN films provided a quasi longitudinal mode and a quasi fast shear mode. For the quasi longitudinal mode, the acoustic velocity is 10717 m/s and the piezoelectric coupling constant ($K^{2}$) value is 4%. For the quasi fast shear mode, the acoustic velocity is 5957 m/s and the $K^{2}$ value is 3.8%.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-06-15
著者
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Wu Sean
Department Of Electrical Engineering National Cheng Kung University
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Lee Maw-shung
Department And Institute Of Electronics Engineering National Kaohsiung University Of Applied Science
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Ro Ruyen
Department Of Electrical Engineering I-shou University
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Wu Sean
Department of Electronics Engineering and Computer Sciences, Tung-Fang Institute of Technology, 110 Tung-Fung Road, Hunei Shiang, Kaohsiung 829, Taiwan, R.O.C.
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Lin Zhi-Xun
Department of Electrical Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan, R.O.C.
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Ro Ruyen
Department of Communication Engineering, I-Shou University, 1, Section 1, Hsueh-Cheng Rd., Ta-Hsu Hsiang, Kaohsiung County 840, Taiwan, R.O.C.
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