$\beta$-FeSi2 Continuous Films Prepared on Corning 7059 Glass by RF-Magnetron Sputtering
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概要
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More than 1-μm-thick single-phase $\beta$-FeSi2 continuous films on Corning 7059 glass and quartz have been obtained by an easy method. We controlled the Si/Fe composition ratio of Fe–Si precursor using a Si target with sectorial Fe plates placed on it. Both surface flatness of the film and $\beta$-FeSi2/substrate interface were satisfactory, and cracks were not observed by secondary ion microscopy. Suitable electric properties of $\beta$-FeSi2 for solar cell absorption layers ($ p$-type, 5 $\Omega$$\cdot$cm, 40 cm/(V$ \cdot $s), and $1 \times 10^{17}$ cm-3) were obtained from a $\text{Si/Fe}=1.7$ Fe-rich precursor.
- 2005-09-15
著者
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Ito Kentaro
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
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Momose Noritaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
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Takahashi Masashi
Department Of Animal And Grassland Research National Agricultural Center For Kyushu Okinawa Region
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Hashimoto Yoshio
Department Of Anesthesiology University Of Hirosaki School Of Medicine
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Momose Noritaka
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Okuda Yukiko
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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