Excimer UV Processing of (Bi,Nd)4Ti3O12 Ferroelectric Thin Films by Chemical Solution Deposition Method
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概要
- 論文の詳細を見る
Ferroelectric (Bi,Nd)4Ti3O12 (BNT) thin films were prepared on Pt/TiOx/SiO2/Si substrates by the chemical solution deposition (CSD) method. Organic species of as-deposited BNT precursor films were completely removed using excimer UV irradiation at 300°C. Synthesized BNT films using excimer UV irradiation showed a random orientation with a strong (117) reflection and a dense microstructure having grain sizes of 100–150 nm and a smooth surface. Excimer UV irradiation was very effective in the improvement of surface morphology of the BNT thin films. BNT thin films crystallized at a low temperature of 550°C through the excimer UV irradiation process showed a well-saturated $P$-$E$ hysteresis loop with a $P_{\text{r}}$ of 16.1 μC/cm2 and $E_{\text{c}}$ of 102 kV/cm. The ferroelectric properties of BNT thin films were greatly improved by irradiating excimer UV onto as-deposited BNT precursor films.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
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Yamada Mio
Department Of Applied Chemistry Graduate School Of Engineering Nagoya University
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Togawa Daichi
Department Of Materials Science And Engineering Shonan Institute Of Technology
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Kikuta Koichi
Department Of Applied Chemistry Graduate School Of Engineering Nagoya University
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Hirano Shin-ichi
Department Of Applied Chemistry Graduate School Of Engineering Nagoya University
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Sakamoto Wataru
Center For Integrated Research In Science And Engineering Nagoya University
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Hayashi Takashi
Department Of Applied Chemistry Graduate School Of Engineering Osaka University
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Togawa Daichi
Department of Materials Science and Engineering, Shonan Institute of Technology, 1-1-25 Tsujido-Nishikaigan, Fujisawa, Kanagawa 251-8511, Japan
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Iizawa Naoya
Department of Materials Science and Engineering, Shonan Institute of Technology, 1-1-25 Tsujido-Nishikaigan, Fujisawa, Kanagawa 251-8511, Japan
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Iizawa Naoya
Department of Material Science and Engineering, Shonan Institute of Technology
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Yamada Mio
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Hayashi Takashi
Department of Materials Science and Engineering, Shonan Institute of Technology, 1-1-25 Tsujido-Nishikaigan, Fujisawa, Kanagawa 251-8511, Japan
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Kikuta Koichi
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Hirano Shin-ichi
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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