Preparation and Dielectric Properties of SrTiO_3/BaTiO_3 Multilayer Thin Films by Sol-Gel Method
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概要
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SrTiO_3/BaTiO_3 multilayer thin films were prepared at 650℃ on Pt(111)/SiO_2/Si(100) substrates by the dip-coating method using metal alkoxides. No formation of (Ba, Sr)TiO_3 solid solution between BaTiO_3 layers and SrTiO_3 layers was detected in X-ray diffraction analysis. The SrTiO_3/BaTiO_3 multilayer thin films consisted of grain structure with grain size of about 30 nm. A film thickness of about 20 nm was obtained by one cycle of the dip-coating/ heating process. The SrTiO_3/BaTiO_3 multilayer thin films with a thickness of 400 nm exhibited dielectric constants of about 400 and loss tangent of 0.03. By reheating the multilayer thin films at temperatures up to 1000℃, (Ba_<1-x>Sr_x)TiO_3 solid solution with the composition gradient between Ba and Sr was formed.
- 社団法人応用物理学会の論文
- 1995-09-30
著者
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Tanaka Takashi
Department Of Internal Medicine Fukui Cardiovascular Center
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Hayashi Takashi
Department Of Applied Chemistry Graduate School Of Engineering Osaka University
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Hayashi Takashi
Department Of Materials Science And Ceramic Technology Shonan Institute Of Technology
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Tanaka Takashi
Department Of Central Clinical Laboratory Teikyo University Hospital
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Tanaka Takashi
Department Of Materials Science And Ceramic Technology Shonan Institute Of Technology
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