Fabrication of TiO2-Based Transparent Conducting Oxide Films on Glass by Pulsed Laser Deposition
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概要
- 論文の詳細を見る
Nb-doped anatase TiO2 (Ti0.94Nb0.06O2) films with excellent conductivity and transparency were deposited on non-alkali glass by pulsed laser deposition. X-ray diffraction analysis and transmission electron microscopy confirmed that the obtained films were polycrystalline with anatase structure. The films deposited at a substrate temperature of 250 °C with subsequent H2 annealing at 500 °C showed a resistivity of $1.5 \times 10^{-3}$ $\Omega$$\cdot$cm at room temperature and an optical transmittance of 60–80% in the visible region. These results indicate that anatase Ti0.94Nb0.06O2 has great potential as a transparent conducting oxide that could replace Sn-doped In2O3 (ITO).
- Japan Society of Applied Physicsの論文
- 2007-01-25
著者
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FURUBAYASHI Yutaka
Kanagawa Academy of Science and Technology (KAST)
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KONUMA Seiji
Kanagawa Academy of Science and Technology (KAST)
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Ueda Atsuki
Department Of Chemistry University Of Tokyo
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Hirose Yasushi
Kanagawa Academy Of Science And Technology
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Shimada Toshihiro
Department Of Chemistry School Of Science The University Of Tokyo
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Hasegawa Tetsuya
Department Of Applied Chemistry Himeji Institute Of Technology
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Hasegawa Tetsuya
Department of Chemistry, University of Tokyo, Tokyo 113-0033, Japan
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Hitotsugi Taro
Department of Chemistry, University of Tokyo, Tokyo 113-0033, Japan
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Hitosugi Taro
Department of Chemistry, University of Tokyo, Tokyo 113-0033, Japan
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Konuma Seiji
Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan
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