Fabrication of Nb-Doped TiO2 Transparent Conducting Films by Postdeposition Annealing under Nitrogen Atmosphere
スポンサーリンク
概要
- 論文の詳細を見る
Here, we report that highly conductive polycrystalline anatase Nb-doped TiO2 (TNO) thin films can be prepared via crystallization of amorphous precursors under N2 atmosphere. An optimized TNO film on a glass substrate exhibited a low resistivity of 8.4 \times 10^{-4} \Omega cm and an absorbance of 6% at a wavelength of 460 nm. These transport and optical properties were comparable to those of TNO films fabricated by vacuum annealing. This demonstrates the potential of TNO as an electrode for GaN-based light-emitting diodes.
- 2012-11-25
著者
-
NAKAO Shoichiro
Kanagawa Academy of Science and Technology (KAST)
-
HASEGAWA Tetsuya
Kanagawa Academy of Science and Technology (KAST)
-
Hirose Yasushi
Kanagawa Academy Of Science And Technology
-
Hirose Yasushi
Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan
-
Nakao Shoichiro
Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan
-
Hitosugi Taro
Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, Sendai 980-8577, Japan
-
Ohkubo Junpei
Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan
-
Okazaki Sohei
Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan
関連論文
- High magnetic field effect in organic light emitting diodes
- Electronic Band Structure of Transparent Conductor : Nb-Doped Anatase TiO_2
- Low-temperature Fabrication of Transparent Conducting Anatase Nb-doped TiO_2 Films by Sputtering
- Preparation of Layered-Rhombohedral LiCoO_2 Epitaxial Thin Films Using Pulsed Laser Deposition
- Enhancement of Magneto-Optical Properties of Anatase Co:TiO_2 Co-Doped with Nb
- Magnetic Properties of Rutile Ti_Fe_xO_2 Epitaxial Thin Films
- Magnetic Domain Structures Governed by Granular Morphology in La_Sr_MnO_3 Thin Films as Probed by Low-Temperature Magnetic Force Microscopy
- Quantitative Conductivity Mapping of SrTiO_3-LaAlO_3-LaTiO_3 Ternary Composition-Spread Thin Film by Scanning Microwave Microscope
- Direct Observation of Interlayer Josephson Vortices in Heavily Pb-Doped Bi_2Sr_2CaCu_2O_y by Scanning Superconducting Quantum Interference Device Microscopy
- Heteroepitaxial Growth of Rutile TiO_2 on GaN(0001) by Pulsed Laser Deposition
- Mg_xZn_O-Based Schottky Photodiode for Highly Color-Selective Ultraviolet Light Detection
- Plasma-assisted Molecular Beam Epitaxy of High Optical Quality MgZnO Films on Zn-polar ZnO Substrates
- High Electron Mobility Exceeding 10^4cm^2V^ s^ in Mg_xZn_O/ZnO Single Heterostructures Grown by Molecular Beam Epitaxy
- Enhanced Carrier Transport in Uniaxially (001)-Oriented Anatase Ti0.94Nb0.06O2 Films Grown on Nanosheet Seed Layers
- High Mobility Exceeding 80 cm2 V-1 s-1 in Polycrystalline Ta-Doped SnO2 Thin Films on Glass Using Anatase TiO2 Seed Layers
- Magnetic and Transport Properties of Anatase TiO2 Codoped with Fe and Nb
- Wet Etching of TiO2-Based Precursor Amorphous Films for Transparent Electrodes
- Sputter Deposition of High-Mobility Sn1-xTaxO2 Films on Anatase-TiO2-Coated Glass
- High-Throughput Screening of Ultraviolet-Visible Magnetooptical Properties of Spinel Ferrite (Zn, Co)Fe_2O_4 Solid Solution Epitaxial Film by a Composition-Spread Approach
- Uniaxial Alignment of Alq_3 by Laser-Assisted Molecular Beam Epitaxy
- Crystallization kinetics of amorphous sputtered Nb-doped TiO2 thin films
- Crystallization Kinetics of Amorphous Sputtered Nb-Doped TiO_2 Thin Films
- Enhanced Carrier Generation in Nb-Doped SnO Thin Films Grown on Strain-Inducing Substrates
- Fabrication of Nb-Doped TiO2 Transparent Conducting Films by Postdeposition Annealing under Nitrogen Atmosphere
- Enhanced Carrier Generation in Nb-Doped SnO_2 Thin Films Grown on Strain-Inducing Substrates
- Direct Observation of Interlayer Josephson Vortices in Heavily Pb-Doped Bi2Sr2CaCu2Oy by Scanning Superconducting Quantum Interference Device Microscopy
- Ta-doped Anatase TiO2 Epitaxial Film as Transparent Conducting Oxide
- Enhancement of Magneto-Optical Properties of Anatase Co:TiO2 Co-Doped with Nb
- Magnetotransport Properties of Fe/Pentacene/Co:TiO2 Junctions with Fe Top Contact Electrodes Prepared by Thermal Evaporation and Pulsed Laser Deposition
- Fabrication of TiO2-Based Transparent Conducting Oxide Films on Glass by Pulsed Laser Deposition
- Fabrication of Low Resistivity Nb-doped TiO2 Transparent Conductive Polycrystalline Films on Glass by Reactive Sputtering
- Fabrication of EuTiO3 Epitaxial Thin Films by Pulsed Laser Deposition