Sputter Deposition of High-Mobility Sn1-xTaxO2 Films on Anatase-TiO2-Coated Glass
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概要
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Ta-doped SnO2 (Sn0.99Ta0.01O2; TTO) films were successfully sputter deposited with a high mobility of 49 cm2 V-1 s-1 on glass coated with anatase-TiO2 seed layers. The high mobility enabled the achievement of a film resistivity of $5.9 \times 10^{-4}$ $\Omega$ cm. This value of resistivity is one of the lowest ever reported for SnO2-based polycrystalline films without enhanced free-carrier absorption. An optimized film with a sheet resistance of 14 $\Omega$/$\square$ exhibited a transmittance of more than 70%, even in the near-infrared region. These results demonstrate that sputtered TTO films obtained by the TiO2 seed layer method are suitable for use in transparent electrodes in solar cells.
- 2010-10-25
著者
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NAKAO Shoichiro
Kanagawa Academy of Science and Technology (KAST)
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YAMADA Naoomi
Kanagawa Academy of Science and Technology (KAST)
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HASEGAWA Tetsuya
Kanagawa Academy of Science and Technology (KAST)
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HITOSUGI Taro
Kanagawa Academy of Science and Technology (KAST)
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