Enhancement of Blue Emission from Mg-Doped GaN Using Remote Plasma Containing Atomic Hydrogen
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概要
- 論文の詳細を見る
We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300–400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor–acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at $E_{\text{c}}-0.37$ eV involved in the DAP emission.
- 2005-07-10
著者
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Mukai Takashi
Nitride Semiconductor Research Laboratory Nichia Corporation
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KAMIURA Yoichi
Division of Industrial Innovation Sciences, The Graduate School of Natural Science and Technology, O
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ISHIYAMA Takeshi
Division of Industrial Innovation Sciences, The Graduate School of Natural Science and Technology, O
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YAMASHITA Yoshifumi
Division of Industrial Innovation Sciences, The Graduate School of Natural Science and Technology, O
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Tamura Jin
Division Of Industrial Innovation Sciences The Graduate School Of Natural Science And Technology Oka
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Kaneshiro Masahiro
Division Of Industrial Innovation Sciences The Graduate School Of Natural Science And Technology Oka
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Mitani Tomotsugu
Nitride Semiconductor Research Laboratory Nichia Corporation
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Yamashita Yoshifumi
Division of Industrial Innovation Sciences, The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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Kamiura Yoichi
Division of Industrial Innovation Sciences, The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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Mitani Tomotsugu
Nitride Semiconductor Research Laboratory, Nichia Corporation, 491 Oka, Kaminaka, Anan, Tokushima 774-8601, Japan
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Ishiyama Takeshi
Division of Industrial Innovation Sciences, The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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Kaneshiro Masahiro
Division of Industrial Innovation Sciences, The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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