アクチュエータ故障に対する冗長支持空気圧除振台の出力再分配法

概要

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Force redistribution method for compensating actuator-breakdown of vibration isolation tables is studied in this paper. The vibration isolation table is supported by eight pneumatic actuators, and has a redundant number of actuators with respect to degrees of freedom of table motion. We propose a force redistributing method which utilizes redundancy of the actuators. When some of the actuators break down, their output forces are re-distributed on the unbroken actuators by the proposed method. We construct a detailed mathematical model of the vibration isolation table supported by a redundant number of pneumatic actuators. Type 1 digital servo system is applied to control the vibration and position of the vibration isolation table. This study performs numerical simulations in which some of the actuators break down and the pressures of the broken actuators decrease at a constant rate. The effectiveness of the proposed method is examined by numerical simulations.