半導体発光素子の研究開発動向

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This paper reviews present states and future trends of research and development of semiconductor light emitting devices of LDs and LEDs, including optoelectronic applicalions. The trends are lower threshold current, higher optical power, shorter wavelengthand novel operation in OEICs. Quantum well structures are essential for low current operation required in OEIC. Atomically controlled heteroepitaxy and fine pattern processing are required for realizing the quantum wire and quantum box. Total high technologies of heteroepitaxy and processing lead to high power density operation. Possible materials for short-wavelength-light of blue and green are presented including II-VI compound semiconductors. A large optoelectronic field would appear after realization of combination of compound semiconductors and Si. The basic common technology for these research and development is heteroepitaxy in which growth mechanisms should be studied in atomic level.
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