面領域の表面性状測定機を対象とした校正及び測定標準に関する研究 : —第1報　粗さ測定用標準面の設計—

概要

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In this paper, we propose a design method to create new surface material measures with irregular surface topographies for the calibration of surface texture measuring instruments having various measurement principles. We also propose the verification system for the surface measuring instruments using those surface material measures. Basic design factors of the surface material measures for three-dimensional (3D) surface roughness measurement are also discussed to create the software gauge data with irregular surface topographies. The software gauge data with 3D irregular topographies based on the non-causal 2D auto-regressive model are utilized to design the surface material measures. The proposed procedure can create surface structures of surface material measures with periodical irregular surface topographies and specified roughness parameter values. The proposed method has capability to create surface material measures with variable roughness parameters for arbitrary evaluation area.