超精密機械加工された高機能表面の微細形状測定とキャラクタリゼーション : スパッタ型薄膜磁気ディスク表面の場合

概要

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The appropriate measuring method for the micro-irregularities on a magnetic rigid disk surface was proposed and the characterizing techniques for such minute topographic data have been developed to correlate with its tribological properties. In addition to the conventional roughness parameters, new statistical parameters for evaluating the textured disk surfaces such as modified structure function based on asperity peaks only, peak height distribution and mean slope near the peak were proposed to distinguish the subtle discrepancies among those textured disks and to estimate the frictional characteristics between a head unit and a disk. The main results obtained were as follows. (1) The preliminary disks with no sputter-coated films have shown the gradually decreasing coefficient of friction with the increased value of arithmetic average roughness R_a up to 15 nm regardless of the texture. (2) In case of the disks coated with carbon layer or liquid lubricant film, the coefficient is greatly influenced by the height and number distribution of asperity peaks and/or the mean slope near the peaks that are evaluated with those statistical parameters presented in this paper.
公益社団法人精密工学会の論文
1990-05-05