共焦点光学系の走査型レーザ顕微鏡による表面凹凸形状測定と機能的ディジタルフィルタ処理

概要

論文の詳細を見る
By using a confocal scanning laser microscope (SLM) which is commercially available, the topography data of surface texture can be easily obtained in a short time. However, unreasonable short-wavelength components tend to be included in the raw data, when compared with the data obtained through a contact stylus instrument. In order to eliminate such noisy components, a digital filtering process was proposed and its design procedure in the spatial frequency domain was developed. The functional performance of the digital filtering was discussed with regard to the surface textures'created by several machining methods. A fairly good agreement was reached between the corrected SLM data and the reference data in respect of perspective 3-D plots and some conventional roughness parameters. On the other hand, this filtering process showed unsatisfactory effects on certain local geometry parameters of surface texture.
公益社団法人精密工学会の論文
1998-05-05