高精度小径スピンドルの回転振れベクトルとチャッキング誤差成分の光学式分離評価

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It is well known that the rotating accuracy of machine tool spindle influences the machining accuracy. Recently the machining tends to shift to the fine cutting and the high speed cutting. Accordingly the higher rotating accuracy of spindle is increasingly required to assure the geometrical qualities. In this study,an optical measuring method for evaluating the revolutionary error of cylindrical specimen attached to the machine tool spindle is proposed. And the development process of an optical system for detecting the center position of cylindrical specimen is presented. The measuring principle is based on the edge detection by quantifying transmitted optical power. The cylindrical specimen is irradiated from the direction perpendicular to the revolution axis of specimen with two light beams which meet at right angles. So we can measure the displacement of the center position of specimen in a plane perpendicular to the revolution axis. The measurement system consists of two optical setups and accurate pin gauges as cylindrical specimen to be measured. The optical setup contains an LED as a light source and a two-divided photo diode as a detector. Using the developed system,we can evaluate displacement of the center position with accuracy of submicron order. We have established the detection method of the center position of small cylinder through the theoretical analysis and some fundamental experiments.
長岡工業高等専門学校の論文
1996-10-31

高精度小径スピンドルの回転振れベクトルとチャッキング誤差成分の光学式分離評価

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