ガウス形レーザビームの平行走査による透過光型エッジ位置検出法 : 第2報, エッジ検出能力におよぼす光学パラメータとエッジ曲率の影響に関する実験解析

概要

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This paper describes an optical detection method of the edge position of the object with a curved sharp edge for developing an optical profile measurement system. The measuring principle is based on the straightness of a laser beam and the diffraction property at the edge of various shapes. Assuming a laser beam with Gaussian distribution parallel to the beam axis, the transmitted beam power is reduced with an increase in the beam interception area by the sharp edge which is positioned at a right angle to the beam. The effects of optical parameters and edge curvature, including straight and circular edges, on the diffraction pattern and the transmitted beam power were experimentally evaluated. The obtained results are as follows: (1) The transmitted beam power is directly related to the diffraction pattern and the attenuation of beam power is a function of the edge position. (2) The detecting sensitivity is influenced by the radius of a photodetector much more than by the distance of the detector. (3) The transmitted beam bower decreases and the secondary wavelet of the diffraction pattern becomes small with an increase in the edge curvature. (4) A maximum exists in the difference of detected positions between circular and straight edges.
一般社団法人日本機械学会の論文
1992-02-25