スタイラス走査方式による表面輪郭形状の離散測定条件に関する研究

概要

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This paper deals with the three-dimensional surface height profiling at lattice sampling points by a stylus instrument for an assessment of relatively long wavelength of isotropic surface texture. The shortest wavelength was derived from the mean spacing between profile peaks at the mean line obtained by a two-dimensional premeasurement using a sufficiently sharp stylus tip. The allowable measuring conditions such as sampling distance and stylus tip radius were determined by considering both the amplitude sensitivity of the displacement transducer and the virtual autocorrelation curves obtained by rolling imaginary circles over the profile. As the number of discrete sampling points is based on the main memory of an ordinary personal computer, the maximum measurement area was inevitably determined. The macroscopic asperity summits were specially taken into account for a purpose of analyzing the interface between two surfaces in contact. The functional summits were detected from an 8-nearest-neighbor analysis. It was demonstrated that the number and location of the obtained summits are influenced markedly by the measuring conditions and the proposed method for choosing stylus tip radius and sampling distance effects a settlement.
公益社団法人精密工学会の論文
1995-06-05