マルチプローブ走査型トンネル顕微鏡と結晶格子による2次元変位エンコーダの開発

概要

論文の詳細を見る
In the paper, a two-dimensional (2-D) encoder using multi tunneling probe scanning tunneling microscope (STM) and a regular crystalline lattice is proposed. Two unit lattice vectors on a graphite crystalline surface, whose length and intersectional angle are 0.246nm and 60°, respectively, are utilized as 2-D displacement references. 2-D displacement of a sample stage, on which graphite crystal is set, can be determined as a linear sum of the two unit lattice vectors which derived from multi current signals of the multiprobes of the STM. In the experiments, the proposed method is compared with a capacitance sensor. Dither modulations applied to STM probes are utilized to obtain multi current signals in a semi-realtime way. The results show the proposed method has a feasibility for measuring a 2-D displacement with resolution of less than 0.1nm having a maximum measurement speed of 100nm/s.
社団法人精密工学会の論文
2005-11-05