S114033 イオンビームミキシング法により成膜したCNx膜の摩擦特性に及ぼすドロップレットの影響([S11403]機素潤滑設計部門第17回卒業研究コンテスト(3))

概要

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The carbonaceous hard coating such as Diamond-Like Carbon is one of the materials to prevent surface damage. It was reported that Carbon Nitride (CNx) coating showed superlow friction coefficient when it slid against a Si3N4 ball in N2 environment. In the case of applying CNx coating for industrial fields, it is necessary to make more than 1.0 pm thickness of CNx coating. However, droplets appear on surface, with making thick CNx coating. As CNx coating is thicker, the number of droplets increase and droplets grow higher and wider. In this study, we clarify the effect of droplets for frictional property of CNx coating. 4 different kinds of thickness of CNx coating were prepared. From the friction test results, under PAO smallest friction coefficient is 0.030. Under PAO after ultraviolet irradiation smallest friction coefficient is 0.022. Friction coefficient increases with higher droplets. In the air, the lower droplets are, the lower friction coefficient is with respect to initial friction.
2011-09-11