P-3 超音波照射下におけるサイズ依存無電解ニッケルめっき

概要

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We propose a method to fabricate a metal-coated fiber probe with a submicron-sized aperture for near-field optical microscopy based on size-dependent electroless plating under ultrasonic irradiation. The method consists of four steps: (A) chemically etching an optical fiber with a core diameter of 2μm and a refractive index difference of 2% in a buffered HF solution with a volume ratio of 40%NH_4F : 50%HF : H_2O= 10:1:1, (B, C) the surface activation by immersing in 1.0 g/dm^3-SnCl_2 and 5.0 mg/dm^3-PdCl_2 aqueous solutions, respectively, (D) electroless nickel plating under ultrasonic irradiation. We performed this method by using a 1MHz-ultrasonic generator (Honda Electronics, W-357HP) with the maximum input power of 600 W, and succeeded in obtaining a nickel-coated probe tip with submicron-sized aperture at an input power of 225W.
日本ソノケミストリー学会の論文