1A2-H17 空気旋回流のアレイ構造を用いた非接触吸引デバイス(MEMSとナノテクノロジー)

概要

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We present a novel application of the MEMS technology to a non-contact gripper using arrayed spiral air flows, aimed at the mitigation of flow-induced vibration of levitated objects. For robot end-effector dealing with fragile objects such as silicon wafers and solar panels, we employ an air flow-based gripping technique with continuous air-blowing, which would enable damage-free handling without contamination. We design the gripper based on the concept of distributed forcing with arrayed spiral-flow chambers and open holes. In this study, we design and fabricate MEMS-based grippers in a size of 5 inch square. It is shown that the attraction force is successfully obtained by the negative pressure of a spiral flow in each chamber, and that open holes play an important role in eliminating the interaction between the neighboring chambers.
2011-05-26