1A2-H02 導電性液体を用いた低拘束力MEMSポテンショメータ(MEMSとナノテクノロジー)

概要

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This paper presents a MEMS potentiometer that uses a connection through a probe dipping into a μPool (PDP-connection). We proposed a PDP-connection to keep physical restrictions that cause serious problems for micro actuation at a minimum. A PDP-connection employs a probe electrode that is dipped into a μPool filled with a conductive liquid. A PDP-connection works as a variable resistor for a potentiometer as well as low restriction wiring. The proposed potentiometer can drastically reduce the physical restrictions at the contact point of a variable resistor. The developed potentiometer based on the PDP-connection using φ20μm probe could detect displacements of 2 μm with good linearity. The measured restriction force was a few mN at 5 μm/s motion velocity, whereas a commercial potentiometer requires at least 100 mN.
一般社団法人日本機械学会の論文
2011-05-26