1P1-N04 静電吸着制御型マイクロアクチュエータの光通信応用(MEMSとナノテクノロジー)

概要

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This paper presents an optical dynamic gain equalizer (hereafter DGEQ) using an electrostatically controlled linear inchworm actuator (hereafter ECLIA). The actuator consists of silicon sliders, a glass driving stage, a piezo actuator, and a base flame. A slider of ECLIA attenuates an intensity of an optical beam, so that parallel motions of arrayed sliders are able to control and equalize spectrums of demultiplexed signals. A designed DGEQ takes the following advantages of ECLIA to provide gain flattening of spectral gain non-uniformities: Precise motion, Large stroke, Parallel motions of arrayed sliders. The developed feedback control system shows that a single slider position can be controlled within about ±0.7μm from objective position.
一般社団法人日本機械学会の論文
2007-05-11