302 高精度な摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブの開発(T01-1 マイクロ・ナノダイナミクスの計測と制御(1),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

論文の詳細を見る
Conventional friction force microscope (FFM) had the disadvantage of low force sensitivity due to mechanical interference between torsion caused by friction force and caused deflection by normal force. We have developed dual-axis micro-mechanical probe. It measures the lateral force by detecting the deflection of the double cantilever and measures the vertical force by the torsion beam. However, the method of calibrating the probe lateral deflection has not been established. In this study, we present a new method precisely which calibrates the probe lateral displacement in order to detect the friction force.
社団法人日本機械学会の論文
2008-08-02