2811 DETF型共振器を用いたカセンサの開発(J20 マイクロナノ理工学,2005年度年次大会)

概要

論文の詳細を見る
A novel force sensor that can provide high sensitivity with accurate gap control has been presented. It combines a double-ended tuning fork (DETF) resonator with a rigid beam. When the force to be measured is applied to the rigid beam, the resonant frequency of the tuning fork changes due to the change of the tension. The DETF-based sensor can detect the force as the amplitude change corresponding to the resonant frequency change. The performance of the sensor was theoretically and experimentally investigated. The sensor can measure the force under the condition that the change of the probe-sample gap is less than 1nm. The experimentally attained minimum detection limit of the force was 19.6mN and this can be improved by two order of magnitude according to theoretical estimation. The DETF-based force sensor can be useful tool for various field such as development of micro/nano-machine, micro/nano-tribology, probe microscopy.
2005-09-18