5701 シリコンウェハ表面におけるナノ分子潤滑膜のテクスチャ構造の形成(J21-1 マイクロナノ理工学(1),J21 マイクロナノ理工学)

概要

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To tailor the tribological performance of molecularly thin liquid lubricant films coated on silicon wafer surfaces, we have developed two kinds of methods to pattern the films utilizing ultraviolet (UV) irradiation through a mask. One is irradiation on lubricant films subsequent to lubricant application, and the other is irradiation on silicon surfaces prior to lubricant application. Measuring the time-dependent distributions of the films after UV irradiation, we confirmed that both methods are capable of patterning nanometer-thick lubricant films to three-dimensional concave-convex structures. In the former method, lubricant textures are gradually developed as the result of molecular flow occurring from non-irradiated to irradiated regions after irradiation. In the latter method, lubricant textures are developed immediately because of the increased lubricant affinity of silicon surfaces after irradiation.
2006-09-15